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Cleanroom Air Cleanliness |
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CLEANROOM AIR CLEANLINESS STANDARDS Comparison Between Standards | ISO 14644-1 | American Fed 209E | EU GMP | BS5295:1989 | | CLASS | Metric | Imperial | At rest | In operation | | | 1 | - | - | - | - | | | 2 | - | - | - | - | | | | M1 | - | - | - | | | 3 | M1.5 | 1 | - | - | C | | | M2 | - | - | - | | | 4 | M2.5 | 10 | - | - | D | | | M3 | - | - | - | | | 5 | M3.5 | 100 | A/B | A | E/F | | | M4 | - | - | - | | | 6 | M4.5 | 1 000 | - | - | G/H | | | M5 | - | - | | | | 7 | M5.5 | 10 000 | C | B | J | | | M6 | - | - | - | | | 8 | M6.5 | 100 000 | D | C | K | | | M7 | - | - | - | | | 9 | - | - | - | - | |
| ISO 14644-1 Selected airborne cleanliness classes for cleanrooms and clean zones | | Maximum concentration limits (particles per m3 of air) for particles equal to or greater than the considered sizes below (values rounded up to three significant figures) | | | Class No. (N) | 0.1mm | 0.2mm | 0.3mm | 0.5mm | 1.0mm | 5mm | | | ISO 1 | 10 | 2 | | | | | | | ISO 2 | 100 | 24 | 10 | 4 | | | | | ISO 3 | 1 000 | 237 | 102 | 35 | 8 | | | | ISO 4 | 10 000 | 2 370 | 1 020 | 352 | 83 | | | | ISO 5 | 100 000 | 23 700 | 10 200 | 3 520 | 832 | 29 | | | ISO 6 | 1 000 000 | 237 000 | 102 000 | 35 200 | 8 320 | 293 | | | ISO 7 | | | | 352 000 | 83 200 | 2 930 | | | ISO 8 | | | | 3 520 000 | 832 000 | 29 300 | | | ISO 9 | | | | 35 200 000 | 8 320 000 | 293 000 | | | | | | | | | | | | | | | | | | | | | | | | | | | |
Note: Uncertainties relating to the measurement process may require thatconcentration data with no more than three significant figures be used in determining the classification level
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Last Updated ( Friday, 30 July 2010 )
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EN Standards 